Hello.
MSc-PhD would help you develop your core in the subject while MTech-PhD would give you a great exposure to practical knowledge. Both of them are usually pretty much similar but it's just the degree that varies. You'd still have a little theoretical grip in MSc while MTech would completely be research based. The PhDs in both cases would still have the same value.
I hope I've cleared your doubts, if you still have any other doubts, feel free to ask.
Thank you.
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